Development of a Novel 2-Dimensional Micro-Heater Array Device with Regional Selective Heating

  •  Mitsuhiro Horade    
  •  Masaru Kojima    
  •  Kazuto Kamiyama    
  •  Yasushi Mae    
  •  Tatsuo Arai    


This paper reports the development of a micro-heater array device that can be selectively heated at an arbitrary location. To confirm the heating characteristics of this micro-heater array device, heating experiments using a thermo-responsive gel were conducted. Since a micro-heater can supply heat with a rapid-response on a micro-scale, various applications have been studied. Based on these characteristics, micro-heaters have often been used in recent research applications involving biological cells. To expand the versatility of the micro-heater, the development of micro-heater array systems that can supply heat selectively at an arbitrary location is required. In this work, to support micro-heater applications in the field of biochemistry, the design and materials of a micro-heater array device were optimized and a fabrication process was established. Furthermore, the usefulness of this device was verified using a thermo-responsive gel, and control of the temperature distribution on a glass substrate was successfully demonstrated. This micro-heater array device can be heated with regional selectivity, and each region can be controlled to an arbitrary temperature, so the device is also capable of generating temperature gradients.

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  • ISSN(Print): 1927-0607
  • ISSN(Online): 1927-0615
  • Started: 2011
  • Frequency: annual