Abstract

Results of an experimental study of the oxygen permeability of a PET film with nanosized aluminum oxide layers formed by reactive magnetron sputtering have been described. An experimental dependence of the oxygen permeability coefficient of PET film with the aluminum oxide layer in the range of 20 ÷ 80 nm, providing its value up to 1 cm³/(m²∙24h∙0.1MPa), have been determined. The effect of various factors on the formation of a high-quality reproducible oxide PET film and the characteristics of a nanosized aluminum oxide layer and the specific electric energy consumption for the magnetron deposition of the layer has been defined. The planar surface structures and surface roughness parameters of PET and oxide films with layers of different thicknesses have been determined. A qualitative interpretation of the results has been given.

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