Rotation of Scanner’s Mirror in MEMS Dimensions with the Use of Lorents Law

  •  Said Farahat    
  •  Aria Nouri Jangi    


In this project we study a kind of scanner in micro dimensions in which it includes three frames also the third
frame is considered as fixed surface and the two others are including two separate coils that electric current
enters it and when we expose this electric current in a magnetic field under a specific conditions then with the
use of Lorents Force law we can cause the rotation of the frame and mirror’s surface accordingly.
Discussed field in this project has a magnitude of between 0.2-4 Tesla in which this magnetic field has no
destructive effect on human body also the electric current has a magnitude of between 0.001-0.14 Amper in
which the maximum obtained rotation angle is equal to ±54.49724 that in every half cycle with the use of two
frames it can be deviated 54.49724 degree from the mirror. This plan with the lower number in coil with a design
in smaller dimensions (micrometer) is simulated with a more different design and the result was acceptable so it
has been much favored for its medical capabilities.
Frames are linked together with Su-8 polymer in which this polymer has been used because of its appropriate
softness and bending.

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