Study on the Encapsulation of the MOEMS Acoustic Sensor Based on F-P Cavity

Bingli Jiang, Kuntao Yang, Zhujun Wan, Jiang’an Wang


The MOEMS (Optical Micro electro mechanical system) acoustic sensor is the new-generation acoustic sensor technology based on the extrinsic Fabry-Perot cavity (EFPI) integrating the MEMS technology, the micro-photonics, and the acoustic sensor technology, with many advantages such as high sensitivity, anti-electromagnetic field, and anti-radio-frequency interference (RFI). The method and loss of the MOEMS acoustic sensor encapsulation are studied in this article, and the result showed that the insertion loss is most sensitive to the angled mismatching, and the cavity length is accurately positioned by the method of reflection spectrum, which has been tested in the experiment.

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Modern Applied Science   ISSN 1913-1844 (Print)   ISSN 1913-1852 (Online)

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