The Method of Spherical Surface Roughness Measurement

Xiaohui Xu, Yan Cui

Abstract


The spherical surface is measured by means of Atomic Force Microscope (AFM) on nanometer scale. In order to evaluate the surface quality of this kind of three dimensional measurement, the following parameters are suggested: Ra,Rq,Ry and Tp. Some questions related to this choice are discussed in this paper.


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DOI: http://dx.doi.org/10.5539/mas.v3n12p94

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