The Development of Ion Nano-beams - A Review

S. Kalbitzer, V. A. Zhukov


With the advent of the super-tip ion source very favourable conditions for generating ion nano-beams have been provided. The basic physical principles for a super-tip-gas field ion source are described As a consequence of a very small source emittance of ? ~ 10-24 m2sr ultra-bright rare gas ion beams of about 1016 A/ can be produced. As a further consequence, very narrow probe sizes are obtainable, of dp< 1 nm, with spatial resolutions far below the classical limits of light-optics and even below the novel stimulated-emission-depletion microscopy [*STED (microscopy) = stimulated emission depletion (microscopy) Th. A. Klar, S. W. Hell, Opt.Lett. 24 (1999) 954-956]. Various ion-nanobeam applications in both materials modification, and analysis are envisaged.

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Applied Physics Research   ISSN 1916-9639 (Print)   ISSN 1916-9647 (Online)

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